Fundamental Principles of Engineering Nanometrology

2nd edition. Nanometrology demystified for a wide audience of engineers, scientists and students.

Table des matières

1. Introduction to metrology for micro- and nanotechnology2. Some basics of measurement3. Precision measurement instrumentation - some design principles4. Length traceability using interferometry5. Displacement measurement6. Surface topography measurement instrumentation7. Scanning probe and particle beam microscopy8. Surface topography characterization9. Co-ordinate metrology10. Mass and force measurement

A propos de l'auteur

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Détails du produit

• Auteurs: Richard Leach
• Edition: Elsevier
• Langues: Anglais
• Format d'édition: Livre Relié
• Sortie: 03.06.2014
• EAN: 9781455777532
• ISBN: 978-1-4557-7753-2
• Pages: 384
• Dimensions: 200 mm x 243 mm x 25 mm
• Poids: 975 g
• Thème: Micro and Nano Technologies
• Catégorie: Sciences naturelles, médecine, informatique, technique > Technique > Technique chimique