Fundamental Principles of Engineering Nanometrology

Presents the principles of engineering metrology applied to the micro- and nanoscale suitable for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. This work also covers basic metrological terminology, and the important topic of measurement uncertainty.

Table des matières

Introduction to metrology for micro- and nanotechnology; Some basics of measurement; Precision measurement instrumentation - some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A SI units of measurement and their realisation at NPL; Appendix B SI derived units

Détails du produit

• Auteurs: Richard Leach, Richard K. Leach
• Edition: ELSEVIER SCIENCE BV
• Langues: Anglais
• Format d'édition: Livre Relié
• Sortie: 09.11.2009
• EAN: 9780080964546
• ISBN: 978-0-08-096454-6
• Pages: 352
• Thèmes: Micro/Nano Technologies; Micro and Nano Technologies
• Catégorie: Sciences naturelles, médecine, informatique, technique > Technique > Général, dictionnaires