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The advent of low-pressure synthesis techniques for the chemical vapour deposition (CVD) of diamond has opened up a new and fascinating field of research and development. The preparation of diamond in the shape of thin films or extended wafers has enabled a variety of new applications, including optical windows, heat spreaders for thermal management, durable cutting tools, and a variety of sensors. Great effort has been made to develop new and efficient methods of economic low-pressure diamond deposition. This book responds to the worldwide interest with a comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.
Table des matières
I Introduction.- 1. CVD Diamond: A New and Promising Material.- II Methods of CVD-Diamond Production.- 2. Microwave-Plasma Deposition of Diamond.- 3. Combustion Flame Deposition of Diamond.- 4. Plasma-Jet Deposition of Diamond.- 5. Hot-Filament Deposition of Diamond.- 6. Low-Temperature Diamond Deposition.- 7. Other CVD Methods for Diamond Production.- 8. Heteroepitaxy and Highly Oriented Diamond Deposition.- III Applications of CVD Diamond.- 9. Thermal Properties and Applications of CVD Diamond.- 10. CVD Diamond for Optical Windows.- 11. CVD Diamond for X-ray Windows and Lithography Mask Membranes.- 12. CVD Diamond for Cutting Tools.- 13. CVD-Diamond Sensors for Temperature and Pressure.- 14. CVD Diamond for Surface Acoustic Wave Filters.- 15. Electron Emission from CVD-Diamond Cold Cathodes.- 16. CVD Diamond for Ultraviolet and Particle Detectors.- 17. Electronic Devices on CVD Diamond.- IV Outlook.- 18. CVD Diamond in the 21st Century.
