X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semiconductor Structures

This monograph represents a critical survey of the outstanding capabilities of X-ray
diffuse scattering for the structural characterization of mesoscopic material systems. The mesoscopic regime comprises length scales ranging from a few up to some hundreds of nanometers. It is of particular relevance at semiconductor layer systems where, for example, interface roughness or low-dimensional objects such as quantum dots and quantum wires have attracted much interest. An extensive overview of the present state-of-the-art theory of X-ray diffuse scattering at mesoscopic structures is given followed by a valuable description of various experimental techniques. Selected up-to-date examples are discussed. The aim of the present book is to combine aspects of self-organized growth of mesoscopic structures with corresponding X-ray diffuse scattering experiments.

Table des matières

A Brief Introduction to the Topic.- Basic Principles of X-Ray Diffuse Scattering on Mesoscopic Structures.- Experimental Optimization.- A Model System: LPE SiGe/Si(001) Islands.- Dynamical Scattering at Grazing Incidence.- Characterization of Quantum Dots.- Characterization of Interface Roughness.- Appendix.

Résumé

This monograph represents a critical survey of the outstanding capabilities of X-ray
diffuse scattering for the structural characterization of mesoscopic material systems. The mesoscopic regime comprises length scales ranging from a few up to some hundreds of nanometers. It is of particular relevance at semiconductor layer systems where, for example, interface roughness or low-dimensional objects such as quantum dots and quantum wires have attracted much interest. An extensive overview of the present state-of-the-art theory of X-ray diffuse scattering at mesoscopic structures is given followed by a valuable description of various experimental techniques. Selected up-to-date examples are discussed. The aim of the present book is to combine aspects of self-organized growth of mesoscopic structures with corresponding X-ray diffuse scattering experiments.

Détails du produit

• Auteurs: Martin Schmidbauer
• Edition: Springer, Berlin
• Langues: Anglais
• Format d'édition: Livre de poche
• Sortie: 13.10.2010
• EAN: 9783642057694
• ISBN: 978-3-642-05769-4
• Pages: 204
• Dimensions: 156 mm x 12 mm x 234 mm
• Poids: 336 g
• Illustrations: X, 204 p.
• Thèmes: Springer Tracts in Modern Physics; Springer Tracts in Modern Physics; Springer Tracts in Modern Physics. Ergebnisse der exakten Naturwissenschaften
• Catégories: Sciences naturelles, médecine, informatique, technique > Physique, astronomie > Electricité, magnétisme, optique; C, Optics, Atoms, Physics, Optical and Electronic Materials, Condensed Matter Physics, Condensed matter, Materials / States of matter, Physics and Astronomy, Classical Electrodynamics, Electricity, electromagnetism & magnetism, Electrodynamics, Electronic materials, Electronic devices & materials, Optical Materials, Atomic & molecular physics, Atomic, Molecular, Optical and Plasma Physics