Introduction to Microlithography

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove
invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

Zusammenfassung

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove
invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

Produktdetails

• Autoren: M. J. Bowden, L. F. Thompson, Larry F. Thompson
• Mitarbeit: Murrae J. Bowden (Herausgeber), Murrae J. (Bell Communications Research Bowden (Herausgeber), etc. (Herausgeber), L. F. Thompson (Herausgeber), Larry F. Thompson (Herausgeber), C. Grant Willson (Herausgeber), C. Grant (University of Texas-Austin Willson (Herausgeber)
• Verlag: Oxford University Press
• Sprache: Englisch
• Produktform: Fester Einband
• Erschienen: 01.01.1994
• EAN: 9780841228481
• ISBN: 978-0-8412-2848-1
• Seiten: 540
• Abmessung: 158 mm x 236 mm x 34 mm
• Gewicht: 888 g
• Serien: ACS Professional Reference Book; Acs Professional Reference Boo; ACS Professional Reference Books; ACS Professional Reference Book; Acs Professional Reference Boo
• Themen: Geisteswissenschaften, Kunst, Musik > Kunst > Innenarchitektur, Design; Naturwissenschaften, Medizin, Informatik, Technik > Chemie > Organische Chemie