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This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'.Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass.The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
Inhaltsverzeichnis
PREFACEPROCESS ENGINEERING METHODS AND MICROSYSTEM TECHNOLOGYMOMENTUM AND HEAT TRANSFER IN MICROSIZED DEVICESTRANSPORT PROCESSES AND EXCHANGE EQUIPMENTMULTIPHASE FLOW, EVAPORATION, AND CONDENSATION AT THE MICROSCALEGENERATION AND MULTIPHASE FLOW OF EMULSIONS IN MICROCHANNELSCHEMICAL REACTIONS IN CONTINUOUS-FLOW MICROSTRUCTURED REACTORSDESIGN PROCESS AND PROJECT MANAGEMENTSIMULATION AND ANALYTICAL MODELING FOR MICROREACTOR DESIGNINTEGRATION OF SENSORS AND PROCESS-ANALYTICAL TECHNIQUESMICROFABRICATION IN METALS AND POLYMERSSILICON MICROFABRICATION FOR MICROFLUIDICSMICROFABRICATION IN CERAMICS AND GLASSINDUSTRIAL APPLICATIONS OF MICROCHANNEL PROCESS TECHNOLOGY IN THE UNITED STATESINDUSTRIAL APPLICATIONS IN EUROPEINDUSTRIAL PRODUCTION PLANTS IN JAPAN AND FUTURE DEVELOPMENTSLABORATORY APPLICATIONS OF MICROSTRUCTURED DEVICES IN STUDENT EDUCATIONSUBJECT INDEX
Über den Autor / die Autorin
Norbert Kockmann is scientific researcher at the chair of microsystem construction of the Institute of Microsystem Technology (IMTEK) of Freiburg University, Germany, since 2001. He began his studies of aerospace engineering in 1985 at the Technical University of Munich. After completing his diploma, he joined the production technology department at Bremen University in 1991 to obtain his Ph.D. in technical thermodynamics, heat and mass transfer. In 1997, he joined the Messer Griesheim company as a trainee and went on to become project leader of a syngas plant for the production of carbon monoxide. His research interests include the construction and manufacture of components for microsystems as well as the fundamental processes in microsystems.
Oliver Brand is Professor of Bioengineering and Microelectronics/Microsystems at Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990, and his PhD from ETH Zurich, Switzerland, in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002). Oliver Brand's research interest is in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging.
Gary K. Fedder is Professor of Electrical and Computer Engineering, Professor of The Robotics Institute and the Director of the Institute for Complex Engineered Systems (ICES) at Carnegie Mellon University, Pittsburgh, USA. He received the BSc and MSc degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his PhD in 1994 from the University of California, Berkeley. His research interests include microelectromechanical systems (MEMS) modeling, simulation and synthesis, integration of MEMS and CMOS, microsensor design, microactuator control systems, and probe-based nanofabrication technologies.
Christofer Hierold holds the Chair of Micro- and Nanosystems at the ETH in Zurich, Switzerland, since April 2002. Prior to that, he spent eleven years with Siemens AG and Infineon Technologies AG, responsible for R&D on microsystems, advanced CMOS processes, memories, nanoelectronics and new materials. His current research work focuses on the evaluation of new materials for MEMS, on advanced microsystems and on nanotransducers. He holds numerous patents and has published over 20 research articles in peer reviewed journals and international conference proceedings. He serves on the program committees of several scientific conferences such as the IEEE MEMS series.
Jan G. Korvink holds a Chair for Microsystem Technology at the University of Freiburg, Germany, where he runs the laboratory for microsystem simulation. He has co-authored more than 100 papers in scientific journals and conference digests, as well as numerous book chapters and a book on semiconductors for engineers. His research interests cover the modeling and simulation of microsystems and the low-cost fabrication of polymer-based MEMS.
Osamu Tabata is Professor in the Department of Microengineering at Kyoto University. He received his MSc and PhD degrees from Nagoya Institute of Technology. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, in 1996, and the Department of Mechanical Engineering at Kyoto University in 2003. Osamu Tabata is engaged in the research of micro/nano processes, MEMS and micro/nano system synthetic engineering. He received numerous awards, including the Science News Award and the Research & Development Top 100 Award in 1993 and 1998.
Zusammenfassung
This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'.
Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.
The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass.
The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
