Temperature Measurement during Millisecond Annealing - Ripple Pyrometry for Flash Lamp Annealers

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Sommario

Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing.- Concept of ripple pyrometry during flash lamp annealing.- Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.

Info autore

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.

Dettagli sul prodotto

• Autori: Denise Reichel
• Editore: Springer, Berlin
• Lingue: Inglese
• Formato: Tascabile
• Pubblicazione: 14.01.2016
• EAN: 9783658113872
• ISBN: 978-3-658-11387-2
• Pagine: 112
• Dimensioni: 109 mm x 12 mm x 205 mm
• Peso: 192 g
• Illustrazioni: XXV, 112 p. 77 illus. in color.
• Serie: MatWerk
• Categorie: Scienze naturali, medicina, informatica, tecnica > Fisica, astronomia > Fisica atomica, fisica nucleare; C, Thermodynamik und Wärme, Materialwissenschaft, Solid State Physics, Thermodynamics, Biomedical and Life Sciences, Condensed Matter Physics, Materials science, Thermodynamics & heat, materials engineering, Engineering—Materials