Capture Pumping Technology

Zusammenfassung Suitable for vacuum engineers, scientists and technicians, this practical textbook introduces the reader to the fundamentals of the subject material of pumping technology. It features equations and rules of thumb to memorize, which are drawn on in designing, operating and trouble-shooting different vacuum systems. Preface. Biographical Note. Acknowledgements. 1. Basic Theory. 2. Sputter-Ion Pumping. 3. Titanium Sublimation Pumping. 4. Nonevaporable Getters (NEG). 5. Cryopumping. Problem Set. References. Subject Index. Author Index.

Dettagli sul prodotto

• Autori: Welch, Kimo M. Welch
• Con la collaborazione di: K. Welch (Editore), K. (4652 Jenkinson Circle Welch (Editore), Welch K. (Editore)
• Editore: ELSEVIER SCIENCE BV
• Lingue: Inglese
• Formato: Tascabile
• Pubblicazione: 12.10.2001
• EAN: 9780444509413
• ISBN: 978-0-444-50941-3
• Pagine: 376
• Categorie: Scienze naturali, medicina, informatica, tecnica > Tecnica > Meccanica, tecnica di produzione; TECHNOLOGY & ENGINEERING / Hydraulics, Hydraulics & pneumatics, Hydraulics / Pneumatics