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Informationen zum Autor Doruk Senkal, PhD, has been working on the development of Inertial Navigation Technologies for Augmented and Virtual Reality applications at Facebook since 2018. Before joining Facebook, he was developing MEMS Inertial Sensors for mobile devices at TDK Invensense. He received his Ph.D. degree in 2015 from University of California, Irvine, with a focus on MEMS Coriolis Vibratory Gyroscopes. Dr. Senkal 's research interests, represented in over 20 international conference papers, 9 peer-reviewed journal papers, and 16 patent applications, encompass all aspects of MEMS inertial sensor development, including sensor design, device fabrication, algorithms, and control. Andrei M. Shkel, PhD, has been on faculty at the University of California, Irvine since 2000, and served as a Program Manager in the Microsystems Technology Office of DARPA. His research interests are reflected in over 250 publications, 40 patents, and 2 books. Dr. Shkel has been on a number of editorial boards, including Editor of IEEE/ASME JMEMS and the founding chair of the IEEE Inertial Sensors. He was awarded the Office of the Secretary of Defense Medal for Exceptional Public Service in 2013, and the 2009 IEEE Sensors Council Technical Achievement Award. He is the IEEE Fellow. Inhaltsverzeichnis List of Abbreviations ix Preface xi About the Authors xiii Part I Fundamentals of Whole-Angle Gyroscopes 1 1 Introduction 3 1.1 Types of Coriolis Vibratory Gyroscopes 3 1.1.1 Nondegenerate Mode Gyroscopes 4 1.1.2 Degenerate Mode Gyroscopes 5 1.2 Generalized CVG Errors 5 1.2.1 Scale Factor Errors 7 1.2.2 Bias Errors 7 1.2.3 Noise Processes 7 1.2.3.1 Allan Variance 7 1.3 Overview 9 2 Dynamics 11 2.1 Introduction to Whole-Angle Gyroscopes 11 2.2 Foucault Pendulum Analogy 11 2.2.1 Damping and Q -factor 12 2.2.1.1 Viscous Damping 13 2.2.1.2 Anchor Losses 14 2.2.1.3 Material Losses 15 2.2.1.4 Surface Losses 16 2.2.1.5 Mode Coupling Losses 16 2.2.1.6 Additional Dissipation Mechanisms 16 2.2.2 Principal Axes of Elasticity and Damping 16 2.3 Canonical Variables 18 2.4 Effect of Structural Imperfections 18 2.5 Challenges of Whole-Angle Gyroscopes 20 3 Control Strategies 23 3.1 Quadrature and Coriolis Duality 23 3.2 Rate Gyroscope Mechanization 24 3.2.1 Open-loop Mechanization 24 3.2.1.1 Drive Mode Oscillator 24 3.2.1.2 Amplitude Gain Control 26 3.2.1.3 Phase Locked Loop/Demodulation 26 3.2.1.4 Quadrature Cancellation 26 3.2.2 Force-to-rebalance Mechanization 27 3.2.2.1 Force-to-rebalance Loop 27 3.2.2.2 Quadrature Null Loop 29 3.3 Whole-Angle Mechanization 29 3.3.1 Control System Overview 30 3.3.2 Amplitude Gain Control 32 3.3.2.1 Vector Drive 32 3.3.2.2 Parametric Drive 33 3.3.3 Quadrature Null Loop 34 3.3.3.1 AC Quadrature Null 34 3.3.3.2 DC Quadrature Null 34 3.3.4 Force-to-rebalance and Virtual Carouseling 35 3.4 Conclusions 35 Part II 2-D Micro-Machined Whole-Angle Gyroscope Architectures 37 4 Overview of 2-D Micro-Machined Whole-Angle Gyroscopes 39 4.1 2-D Micro-Machined Whole-Angle Gyroscope Architectures 39 4.1.1 Lumped Mass Systems 39 4.1.2 Ring/Disk Systems 40 4.1.2.1 Ring Gyroscopes 40 4.1.2.2 Concentric Ring Systems 41 4.1.2.3 Disk Gyroscopes 42 4.2 2-D Micro-Machining Processes 42 4.2.1 Traditional Silicon MEMS Process 43 4.2.2 Integrated MEMS/CMOS Fabrication Process 43 4.2.3 Epitaxial Silicon Encapsulation Process 44 5 Example 2-D Micro-Machined Whole-Angle Gyroscopes ...
