Silicon Micromachining - Engineerin

Zusammenfassung This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material! and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS). Inhaltsverzeichnis 1. Introduction; 2. Anisotropic wet chemical etching; 3. Chemical physics of wet chemical etching; 4. Waferbonding; 5. Examples and applications; 6. Surface micromachining; 7. Isotropic wet chemical etching of silicon; 8. Introduction into dry etching; 9. Why plasmas?; 10. Plasma system configurations; 11. What is plasma etching?; 12. Contact plasma etching; 13. Remote plasma etching; 14. High aspect ratio trench etching; 15. Moulding of microstructures; 16. Fabrication of movable microstructures.

Dettagli sul prodotto

• Autori: M. Elwenspoek, M. (University of Twente Elwenspoek, M. Jansen Elwenspoek, Miko Elwenspoek, H. V. Jansen, Henri V. Jansen
• Editore: Cambridge University Press ELT
• Lingue: Inglese
• Formato: Tascabile
• Pubblicazione: 19.08.2004
• EAN: 9780521607674
• ISBN: 978-0-521-60767-4
• Pagine: 420
• Serie: Cambridge Studies in Semicondu
• Categoria: Scienze naturali, medicina, informatica, tecnica > Tecnica > Elettronica, elettrotecnica, telecomunicazioni