Fr. 355.00

K Tanaka, K. Tanaka

Glow-Discharge Hydrogenated Amorphous Silicon

English · Hardback

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Description

A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin

Product details

Authors	K Tanaka, K. Tanaka
Publisher	Springer Netherlands

Languages	English
Product format	Hardback
Released	29.06.2009

EAN	9780792303091
ISBN	978-0-7923-0309-1
No. of pages	277
Dimensions	156 mm x 234 mm x 19 mm
Weight	590 g
Illustrations	X, 277 p.
Series	Advances in Solid State Technology Advances in Solid State Technology
Subject	Natural sciences, medicine, IT, technology > Physics, astronomy > Atomic physics, nuclear physics

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