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Informationen zum Autor Alina Voda is Associate Professor of Control Systems at Grenoble University in France. She is a well known expert in control applications of different dynamical systems and their application in industry. Klappentext Micro and nanosystems represent a major scientific and technological challenge, with actual and potential applications in almost all fields of the human activity. The aim of the present book is to present how concepts from dynamical control systems (modeling, estimation, observation, identification, feedback control) can be adapted and applied to the development of original very small-scale systems and of their human interfaces. The application fields presented here come from micro and nanorobotics, biochips, near-field microscopy (AFM and STM) and nanosystems networks. Alina Voda has drawn contributions from leading experts at top research universities in France to produce a first overview of the major role that control systems science can play in the development of micro and nanosciences and technologies. Zusammenfassung Micro and nanosystems represent a major scientific and technological challenge, with actual and potential applications in almost all fields of the human activity. Inhaltsverzeichnis Introduction xi PART I. MINI AND MICROSYSTEMS 1 Chapter 1. Modeling and Control of Stick-slip Micropositioning Devices 3 Micky RAKOTONDRABE, Yassine HADDAB, Philippe LUTZ 1.1. Introduction 3 1.2. General description of stick-slip micropositioning devices 4 1.3. Model of the sub-step mode 6 1.4. PI control of the sub-step mode 13 1.5. Modeling the coarsemode 15 1.6. Voltage/frequency (U/f) proportional control of the coarse mode 18 1.7. Conclusion 26 1.8. Bibliography 28 Chapter 2. Microbeam Dynamic Shaping by Closed-loop Electrostatic Actuation using Modal Control 31 Chady KHARRAT, Eric COLINET, Alina VODA 2.1. Introduction 31 2.2. System description 34 2.3. Modal analysis 36 2.4. Mode-based control 40 2.5. Conclusion 50 2.6. Bibliography 53 PART II. NANOSYSTEMS AND NANOWORLD 57 Chapter 3. Observer-based Estimation of Weak Forces in a Nanosystem Measurement Device 59 Gildas BESANÇON, Alina VODA, Guillaume JOURDAN 3.1. Introduction 59 3.2. Observer approach in an AFM measurement set-up 61 3.3. Extension to back action evasion 71 3.4. Conclusion 79 3.5. Acknowledgements 81 3.6. Bibliography 81 Chapter 4. Tunnel Current for a Robust, High-bandwidth and Ultraprecise Nanopositioning 85 Sylvain BLANVILLAIN, Alina VODA, Gildas BESANÇON 4.1. Introduction 85 4.2. System description 87 4.3. System modeling 89 4.4. Problem statement 97 4.5. Tools to deal with noise 100 4.6. Closed-loop requirements 102 4.7. Control strategy 105 4.8. Results 111 4.9. Conclusion 115 4.10. Bibliography 116 Chapter 5. Controller Design and Analysis for High-performance STM 121 Irfan AHMAD, Alina VODA, Gildas BESANÇON 5.1. Introduction 121 5.2. General description of STM 123 5.3. Control design model 127 5.4. H¿ controller design 131 5.5. Analysis with system parametric uncertainties 139 5.6. Simulation results 142 5.7. Conclusions 143 5.8. Bibliography 146 Chapter 6. Modeling, Identification and Control of a Micro-cantilever Array 149 Scott COGAN, Hui HUI, Michel LENCZNER, Emmanuel PILLET, Nicolas RATTIER, Youssef YAKOUBI 6.1. Introduction 150 6.2. Modeling and identification of a cantilever array 151 6.3. Semi-decentralized approximation of optimal control applied to a cantilever array 164 6.4. Simulation of large-scale periodic circuits by a ho...
