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Zusatztext "[T]his book goes beyond the description of most nanofabrication techniques to present several practical applications. ? the profuse use of drawings! illustrations! and pictures will help the reader visualize what is explained and discussed throughout the text. ? both the fundamentals and practical applications related to nanofabrication by lithographic techniques are well covered."-Raúl J. Martín-Palma! Journal of Nanophotonics! 2013"? expertly integrated ? The book is suitable for researchers and engineers in a variety of disciplines. I highly recommend it as a comprehensive introduction to nanofabrication techniques."-Barry R. Masters! Optics & Photonics News"Nanofabrication Handbook is a broad topical introduction to nanofabrication methods and applications. It is rich with illustrations and the authors of the individual chapters have made a real effort to introduce readers to the basic concepts in understandable terms while also capturing the current leading edge in their field. The amazing micrographs of prototype structures that are documented throughout the pages offer an inspiring snapshot of the many and varied accomplishments of the researchers working in these technology development and application fields ? The style used by the authors will allow this volume to serve as a solid introduction to methods in current use in nanoscale research while the breadth of topics will also permit experienced practitioners to learn about methods and applications outside their own areas of experience."-Donald Tennant! Director of Operations! Cornell NanoScale Science and Technology Facility"An impressive work covering all the important nanofabrication topics and contents ? Highly recommended."-Professor Din Ping Tsai! National Taiwan University Informationen zum Autor Stefano Cabrini is director of the Nanofabrication Facility and member of the interfacility nanophotonics group and the "single digit nano fabrication" theme in the Molecular Foundry (a U.S. Department of Energy program) at the Lawrence Berkeley National Laboratory. His research interests include nanophotonics and metamaterials, semiconductor device fabrication, optical device fabrication, MEMS fabrication, and the development of new lithographic tools and processes. Satoshi Kawata is a professor of applied physics at Osaka University, chairman of Nanophoton Corp., and chief scientist of the Nanophotonics Laboratory at RIKEN. A fellow of the Optical Society of America, SPIE, and Institute of Physics, Dr. Kawata has been a recipient of the Medal of Purple Ribbon from the Japanese Emperor; the Science and Technology Award from the Japanese Ministry of Education, Culture, Sports, Science and Technology; the Da Vinci Award of Excellence from LMVH Moët Hennessy Louis Vuitton; and the Japan IBM Science Award. His research interests include nanophotonics, biophotonics, plasmonics, metamaterials, photonic crystals, and nanofabrication through two-photon absorption techniques. Klappentext A comprehensive resource for this rapidly emerging discipline! this book includes detailed discussions of the underlying theoretical basis! the resolution! patterns! and substrates used as well as applications. It builds upon current understanding of microfabrication! moving into the nano dimension and demonstrating how work at this level calls for a different process. Most notably! the book provides guidance on particular lithographic techniques that better fit specific research needs. It includes coverage of how to approach key problems in the decision-making process related to materials! methods! surface considerations! and more. Zusammenfassung While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook
