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The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.
List of contents
1 Introduction.- 1. Design of Microelectromechanical Systems.- 2. Synthesis vs. Analysis.- 3. Optimization as a synthesis tool.- 4. Contents of the chapters.- 5. Closure.- 2 Synthesis for Mechanical Behavior.- 1. Introduction.- 2. Synthesis of beam-like structures.- 3. Topology Synthesis.- 4. Synthesis for dynamic attributes.- 5. Conclusions.- 3 Synthesis of Electrostatically Actuated Mems.- 1. Introduction.- 2. Governing Equations.- 3. Shape Synthesis of Electrostatically Driven Actuators.- 4. An Example: Variable Comb-drive Actuators.- 5. Closure.- 4 Synthesis Methods for Electrothermal Actuation.- 1. Introduction.- 2. Generalization of the BasiC electro-thermal actuator.- 3. Modeling.- 4. Synthesis.- 5. Numerical examples.- 6. Alternative implementation using "line elements".- 7. Advanced example.- 8. MicroFabrication.- 9. Closure.- 5 Synthesis with Piezoelectric Actuation.- 1. Introduction.- 2. Background Theory for Piezoelectricity.- 3. FEM Applied to Piezoelectricity.- 4. Flextensional Actuator Design.- 5. Conclusion.- 6 Synthesis of Piezocomposites.- 1. Piezocomposite Design.- 2. Homogenization Method.- 3. Piezocomposite Design Problem.- 4. Examples.- 5. Conclusions.- 7 Synthesis of Periodic Micro Mechanisms.- 1. Introduction.- 2. Numerical homogenization, FE modeling, and sensitivity analysis.- 3. Formulation of the problem.- 4. Numerical implementation.- 5. Examples.- 6. Wave propagation.- 7. Concluding remarks.- 8 Process Synthesis.- 1. Introduction.- 2. State-space representation.- 3. Planar device representation.- 4. Basic synthesis method.- 5. Cardinality of design space.- 6. Granularity control through condensation.- 7. Other miscellaneous graph-theoretical results.- 8. Process flow construction.- 9. Determination of selective operators.- 10. Processflow parameters.- 11. Software implementation.- 12. Compiler testing.- 13. Summary.- 9 Mask Synthesis.- 1. Introduction.- 2. Related work.- 3. Mathematical framework.- 4. Synthesis.- 5. Examples.- 6. Conclusions.- 10 System-Level Synthesis.- 1. MEMS Design representations.- 2. Synthesis Methodology.- 3. Performance Models.- 4. Synthesis Results.- 5. Summary.
Summary
The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.
