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Informationen zum Autor Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS. Klappentext Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: Expanded coverage of microfabrication plus assembly and packaging technologies The introduction of microgyroscopes, miniature microphones, and heat pipes Design methodologies for thermally actuated multilayered device components The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students. Zusammenfassung Technology/Engineering/Mechanical A bestselling MEMS text. now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. Inhaltsverzeichnis Preface xvii Preface To The First Edition xix Suggestions To Instructors xxiii 1 OVERVIEW OF MEMS AND MICROSYSTEMS 1 1.1 MEMS and Microsystems 1 1.2 Typical MEMS and Microsystems Products 7 1.2.1 Microgears 7 1.2.2 Micromotors 7 1.2.3 Microturbines 7 1.2.4 Micro-Optical Components 7 1.3 Evolution of Microfabrication 10 1.4 Microsystems and Microelectronics 11 1.5 Multidisciplinary Nature of Microsystems Design and Manufacture 13 1.6 Microsystems and Miniaturization 15 1.7 Application of Microsystems in Automotive Industry 21 1.7.1 Safety 22 1.7.2 Engine and Power Trains 24 1.7.3 Comfort and Convenience 24 1.7.4 Vehicle Diagnostics and Health Monitoring 24 1.7.5 Future Automotive Applications 26 1.8 Application of Microsystems in Other Industries 27 1.8.1 Application in Health Care Industry 27 1.8.2 Application in Aerospace Industry 28 1.8.3 Application in Industrial Products 29 1.8.4 Application in Consumer Products 29 1.8.5 Application in Telecommunications 30 1.9 Markets for Microsystems 30 Problems 32 2 WORKING PRINCIPLES OF MICROSYSTEMS 35 2.1 Introduction 35 2.2 Microsensors 35 2.2.1 Acoustic Wave Sensors 36 2.2.2 Biomedical and Biosensors 37 2.2.3 Chemical Sensors 40 2.2.4 Optical Sensors 42 2.2.5 Pressure Sensors 44 2.2.6 Thermal Sensors 50 2.3 Microactuation 53 2.3.1 Actuation Using Thermal Forces 53 2.3.2 Actuatio...
List of contents
Preface.
Chapter 1: Overview of MEMS and Microsystems.
Problems.
Chapter 2: Working Principles of Microsystems.
Problems.
Chapter 3: Engineering Science for Microsystems Design and Fabrication.
Problems.
Chapter 4: Engineering Mechanics for Microsystems Design.
Problems.
Chapter 5: Thermofluid Engineering and Microsystems Design.
Problems.
Chapter 6: Scaling Laws in Miniaturization.
Problems.
Chapter 7: Materials for MEMS and Microsystems.
Problems.
Chapter 8: Microsystems Fabrication Processes.
Problems.
Chapter 9: Overview of Micromanufacturing.
Problems.
Chapter 10: Microsystem Design.
Problems.
Chapter 11: Assembly, Packaging and Testing of Microsystems.
Problems.
Chapter 12: Introduction to Nanoscale Engineering.
Problems.
Bibliography.
Index.
