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Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.
List of contents
1. Introduction 2. What Makes Low-Temperature Plasmas a Versatile Nanotool?3. Specific Examples and Practical Framework4. Generation of Building and Working Units5. Transport, Manipulation and Deposition of Building and Working Units6. Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes7. Ion-Focusing Nanoscale Objects8. Building and Working Units at Work: Applications9. Conclusions and Outlook10. Appendix A. Reactions and Rate Equations11. Appendix B. Why Plasma-based Nanoassembly: A Host of Further Reasons
About the author
Dr. Ken Ostrikov is Australian Queen Elizabeth II Fellow at University of Sydney, Australia. He has been with numerous R&D institutions in Germany, Japan, Singapore, and Australia. His research topics include chemically active plasmas for nanofabrication, synthesis of functional materials and bio-compatible coatings, development of industrial process specifications and integrated plasma facilities for materials synthesis and surface modification, as well as several fundamental topics. Dr. Ostrikov's contribution to the field was honored by several awards and fellowships and published in more than 200 papers in peer-reviewed international journals and conference proceedings.
Summary
Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.
The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.
