Read more
Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
- An in-depth treatment of problems that involve reliable modeling, analysis and design,
- Analytical models with correct dependences on service dimensions,
- Cantilever based systems for nanofabrication researchers and designers, and
- Dynamics of complex spring and beam microsystems.
This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book,
Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.
Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.
List of contents
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies.- Micromechanical Systems: Modal Analysis.- Energy Losses in MEMS and Equivalent Viscous Damping.- Frequency and Time Response of MEMS.
About the author
Nicolae Lobontiu, Ph.D is associate professor of mechanical engineering at the University of Alaska Anchorage. His teaching background has run the gamut of mechanical engineering, including: system dynamics, controls, instrumentation and measurement, mechanics of materials, dynamics, vibrations, finite element analysis, boundary element analysis, and thermal system design. §Professor Lobontiu's research interests for the last decade have focused on compliant mechanisms (mechanical devices which move by elastic deformation of their flexible joints) and micro/nano electromechanical systems.
Summary
Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
- An in-depth treatment of problems that involve reliable modeling, analysis and design,
- Analytical models with correct dependences on service dimensions,
- Cantilever based systems for nanofabrication researchers and designers, and
- Dynamics of complex spring and beam microsystems.
This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book,
Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.
Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.
