Fr. 255.00

Effect of Disorder and Defects in Ion-Implanted Semiconductors - Optical and Photothermal Characterization

English · Hardback

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Description

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Zusammenfassung Focusing on the physics of the annealing kinetics of the damaged layer, this book presents an overview of characterization techniques and a comparison of the information on annealing kinetics. It also provides basic knowledge of ion implantation-induced defects; focuses on physical mechanisms of defect annealing; and more.

Product details

Authors Willardson
Assisted by Costantinos Christofides (Editor), Gerard Ghibaudo (Editor), Eicke R. Weber (Editor), R. K. Willardson (Editor)
Publisher ELSEVIER SCIENCE BV
 
Languages English
Product format Hardback
Released 12.06.1997
 
EAN 9780127521466
ISBN 978-0-12-752146-6
No. of pages 316
Series Semiconductors & Semimetals
Semiconductors and Semimetals
Semiconductors & Semimetals
Subject Natural sciences, medicine, IT, technology > Physics, astronomy > General, dictionaries

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