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Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS). With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication.
Features: - Thorough analysis of fluorine-free, environmentally friendly MEMS etching alternatives
- Coverage of emerging technologies, including supercritical CO¿, ionic liquids, and gas-phase selective etching
- Exploration of AI-driven process optimization for sustainable and efficient MEMS manufacturing
- Detailed industrial case studies highlighting successful implementation and scalability
- Clear discussions on regulatory drivers, market trends, and future roadmaps for sustainable microfabrication
List of contents
Chapter 1: Introduction to Green Etching in MEMS Manufacturing
Chapter 2: Theoretical Foundations and Mechanisms of Etching
Chapter 3: Fluorine-Free Dry Etching for MEMS
Chapter 4: Advanced Dry Etching Technologies for MEMS
Chapter 5: Wet Etching Alternatives for Green MEMS Processing
Chapter 6: Electrochemical Etching for Green MEMS Fabrication
Chapter 7: Energy-Efficient Plasma Etching Techniques for MEMS
Chapter 8: Industrial Adoption and Future Roadmap for Green MEMS Etching
About the author
Kaiying Wang received his PhD in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences. He joined the University of South-Eastern Norway (USN) in 2007 as an associate professor and was promoted to professor in 2010. His research interests focus on micro-fabrication and nanotechnology, electrochemistry, photochemistry and nanodevices for environment and energy applications. For teaching, he has taught the Microfabrication (MFA4000, master) and Nanotechnology (TSE3120, bachelor) at the University of South-Eastern Norway since 2010. Meanwhile, he has participated in several national and European projects related to micro/nano fabrication technology. The related education programmes at USN include: (1) Sensor Systems and Innovation (2) Smart Systems Integrated Solutions, and (3) Micro- and Nano Systems Technology.
