Fast Simulation of Electro-Thermal MEMS - Efficient Dynamic Compact Models

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

List of contents

Dynamic Electro-thermal Simulation of Microsystems.- Overview of Linear Model Order Reduction.- Selected Model Reduction Software.- Application of Model Reduction to Electro-thermal MEMS.- Advanced Development.- References.

About the author

Jan G. Korvink holds a Chair for Microsystem Technology at the University of Freiburg, Germany, where he runs the laboratory for microsystem simulation. He has co-authored more than 100 papers in scientific journals and conference digests, as well as numerous book chapters and a book on semiconductors for engineers. His research interests cover the modeling and simulation of microsystems and the low-cost fabrication of polymer-based MEMS.

Summary

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

Product details

• Authors: Tamar Bechtold, Tamara Bechtold, Jan G Korvink, Jan G. Korvink, Evgenii Rudnyi, Evgenii B Rudnyi, Evgenii B. Rudnyi
• Publisher: Springer, Berlin
• Languages: English
• Product format: Hardback
• Released: 12.10.2006
• EAN: 9783540346128
• ISBN: 978-3-540-34612-8
• No. of pages: 180
• Weight: 506 g
• Illustrations: XII, 180 p.
• Series: Microtechnology and MEMS; Microtechnology and MEMS
• Subjects: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering; Elektronik, B, Ingenieurswesen, Maschinenbau allgemein, Klassische Mechanik, engineering, Classical mechanics, Circuits and Systems, Mechanics, Electronics, Microelectronics, Electronics and Microelectronics, Instrumentation, Engineering: general, Engineering, general, Technology and Engineering, Electronics engineering, Electronic circuits, Electronic Circuits and Systems