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Edited and compiled by scientists with a global reputation in plasma research, this monograph compiles contributions on the latest results in plasma technology. Divided into two main sections, the firston fundamental technology includes plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology deals with polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panel, and anti-corrosion coatings.The result is an indispensable work for physicists, chemists and engineers interested in the recent developments in their field.
List of contents
Basic Approaches to Plasma Production and ControlN. SatoPlasma Sources and Reactor ConfigurationsP. ColpoSimulations for Low-Temperature Plasma ApplicationsJ. K. LeeModeling and diagnostics of He discharges for treatment of polymersD. Mataras3-D Modelling of Thermal Plasmas (RF and Transferred Arc) for the Design of Sources and Industrial ProcessesE. GhediniRF Plasma Sources for Semiconductor processingF. F. ChenAdvanced Plasma Diagnostics for Thin Film DepositionR. EngelnPlasma Processing of Polymers by a Low-Frequency Discharge with Asymmetrical Configuration of ElectrodesF. Arefi-Khonsari and M. TatoulianFundamentals on plasma deposition of fluorocarbon filmsA. MilellaPlasma CVD processes for thin film Si solar cellsA. MatsudaVHF Plasma Production for Solar CellsY. KawaiGrowth Control of Clusters in Reactive Plasmas and Its Application to High-stability a-Si Film DepositionY. WatanabeMicro- and Nano-Structuring in Plasma-Processes for Biomaterials: Micro- and Nano-Features as Powerful Tools to Address Selective Biological ResponsesE. SardellaChemical Immobilization of Biomolecules on Plasma Modified Substrates for Biomedical ApplicationsL. C. LopezIn Vitro Methods to Assess the Biocompatibility of Plasma Modified SurfacesM. NardulliCold gas plasma in biology and medicineE. StoffelsMechanisms of Sterilization and Decontamination of Surfaces by Low Pressure PlasmaF. RossiApplication to Atmospheric Pressure Glow PlasmaM. KogomaHydrocarbon and fluorocarbon thin films deposition in atmospheric pressure glow dielectric barrier dischargesF. FanelliRemark on Production of Atmospheric Pressure Non-Thermal Plasmas for Modern ApplicationR. ItataniPresent status and Future of Color Plasma DisplayT. ShinodaCharacteristics of PDP PlasmasH. IkegamiRecent progress in plasma spray processingT. YoshidaElectrohydraulic Discharge Direct Plasma Water Treatment ProcessesJ.-S. ChangDevelopment and Physics Issues of an Advanced Space PropulsionM. Inutake
About the author
Yoshinobu Kawai works as Research Professor at Interdisciplinary Graduate School of Engineering Sciences at Kyushu University, Japan, since 1974. He is expert in production of large diameter plasma in the frequency range from VHF to microwave for amorphous and microcrystalline silicon solar cell and etching.
Summary
A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.
Report
"this book is worth reading for the ambitious graduate student and very interesting for the specialist in academia and industry who intends to revamp his know-how." ( Plasma Process. Polym . 2008, 5)
