The Physics of Micro/Nano-Fabrication

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

List of contents

1. Preliminary Survey.- 2. Particle Beams: Sources, Optics, and Interactions.- 3. Plasmas: Physics and Chemistry.- 4. Layering Technologies.- 5. Pattern Generation.- 6. Microcharacterization.- 7. Limits to Nanofabrication.- Appendixes.- Author Index.

Summary

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Product details

• Authors: Ivo Brodie, Ivor Brodie, Julius J Muray, Julius J. Muray
• Assisted by: Ivor Brodie (Editor), Julius J. Muray (Editor)
• Publisher: Springer, Berlin
• Languages: English
• Product format: Hardback
• Released: 25.06.2009
• EAN: 9780306441462
• ISBN: 978-0-306-44146-2
• No. of pages: 622
• Weight: 1492 g
• Illustrations: XX, 622 p.
• Series: Microdevices; Microdevices
• Subject: Natural sciences, medicine, IT, technology > Physics, astronomy > Atomic physics, nuclear physics