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System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies.The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs.This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensorindustry, physicists, and physical chemists.
List of contents
PHYSICAL AND MATHEMATICAL FUNDAMENTALS FOR COMPACT MODELING OF MEMS System-Level Modeling of MEMS by Lumped-Elements - Physical Background System-Level Modeling of MEMS by Means of Model Order Reduction - Mathematical Background Modal Reduction - Mathematical Background Issues in MEMS Macromodeling APPLICATIONS OF MODEL REDUCTION BASED SYSTEM LEVEL MODELING OF MEMS Application of Parametric Model Reduction for MEMS System-Level Simulation and Design Application of Nonlinear Model Order Reduction for MEMS System-Level Simulation Model Order Reduction for Circuit Level Simulation of RF MEMS Frequency Selective Devices A Reduced-Order Model for Electrically Actuated Microplates Combination of Analytical Models and Order Reduction Methods for System Level Modeling of Gyroscopes APPLICATIONS OF LUMPED ELEMENT BASED SYSTEM LEVEL MODELING OF MEMS System-level Modeling of Energy-Harvesting modules Intertial MEMS Design with Higher Order Sigma-Delta Control Circuits Macro-Modeling of Systems Including Free-Space Optical MEMS A System-Level Model for a Silicon Thermal Flow Sensor System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers System-Level Simulation of a Micromachined Electrometer using a Time-Domain Variable Capacitor Circuit Model Modeling and System-Level Simulation of a CMOS Convective Accelerometer System-Level Modeling of MEMS Based on SABER PlatformsVHDL Implementation of a communication interface for integrated MEMS Heterogenous (Optics, Fluidics) System-Level Design ENABLING TECHNIQUES FOR SYSTEM LEVEL MODELING OF MEMSManufacturable and EDA Compatible MEMS Design via 3D Parametric libraries MEMS Related Design Optimizing of SiP Efficient Optimization of Transient Dynamic Problems in MEMS Modeling and Synthesis Tools for Analog Circuit Design
