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Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps.In this topical volume, authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass. The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
List of contents
I. FUNDAMENTALS AND ENGINEERING METHODS1 Process engineering methods and micro system technology2 Momentum and heat transfer in micro-sized devices3 Transport processes and exchange equipment4 Multiphase flow, evaporation, and condensation at the microscale5 Generation and multiphase flow of emulsions in microchannels6 Chemical reactions in continuous flow micro-structured reactorsII. DEVICE CONCEPTION AND SIMULATION7 Design process and project management8 Simulation and analytical modeling for microreactor design9 Integration of sensors and process analytical techniquesIII. FABRICATION STRATEGIES AND TECHNIQUES10 Microfabrication in metals and polymers11 Silicon microfabrication for microfluidics12 Microfabrication in ceramics and glassIV. INDUSTRIAL AND LABORATORY APPLICATIONS13 Industrial applications of microchannel process technology in the United States14 Industrial applications in Europe15 Industrial production plants in Japan, future developments16 Laboratory applications of microstructured devices in student education
