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Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies.Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.
List of contents
IntroductionI. TECHNOLOGIESStandard Lithography and Mask TechnologyInnovative Exposure Techniques for 3-D MicrofabricationGalvanics (Electroplating)Moulding (Process and Simulation)Tools for DesignDesign for Assembly and Safe ManufacturingII. APPLICATIONSMarket Analysis and Commercialization of LIGAOptical MEMS and Polymer OpticsX-ray LensesRF ApplicationsEvolution of the SpectrometerMEMS (Actuators)Microfluidics for Biochip ApplicationApplications for Inspection DevicesHarmonic Drive GearsIII. COMMERCIAL EQUIPMENTMachines for Micro Injection MouldingIV. OUTLOOKFilled Resist SystemsTabletop Synchrotron for Future Light Source and its Application for MicrofabricationPTFE Photofabrication by SR (TIEGA Process)
