CMOS - MEMS

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

List of contents

IntroductionFabrication TechnologyMaterial CharacterizationCMOS-based Inertial SensorsCMOS-based Pressure SensorsCMOS-based Acoustic SensorsCMOS-based RF-MEMSCMOS-based Chemical SensorsCMOS-based Biometric SensorsCMOS-bassd Biological SensorsCMOS-based Thermal SensorsCMOS-based NEMSCircuit and System IntegrationAssembly and Packaging

Product details

• Assisted by: Henry Baltes (Editor), Oliver Brand (Editor), Gary K. Fedder (Editor), Christofer Hierold (Editor), Jan G. Korvink (Editor), Osamu Tabata (Editor)
• Publisher: Wiley-VCH
• Languages: English
• Product format: Hardback
• Released: 01.01.2005
• EAN: 9783527310807
• ISBN: 978-3-527-31080-7
• No. of pages: 596
• Dimensions: 186 mm x 246 mm x 37 mm
• Weight: 1272 g
• Illustrations: 312 SW-Abb., 32 Tabellen
• Series: Advanced Micro & Nanosystems; Advanced Micro and Nanosystems
• Subject: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering