Contamination-Free Manufacturing for Semiconductors and Other Precision Products

Summary

This study recognizes the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology. It provides in-depth and advanced treatment on the origins, procedures and disposal of a variety of contaminants and ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS).

Product details

• Authors: Robert P. Donovan, Donovan Robert P.
• Publisher: Taylor and Francis
• Languages: English
• Product format: Hardback
• Released: 14.03.2001
• EAN: 9780824703806
• ISBN: 978-0-8247-0380-6
• No. of pages: 460
• Weight: 680 g
• Subjects: Natural sciences, medicine, IT, technology > Technology > Mechanical engineering, production engineering; SCIENCE / Chemistry / Industrial & Technical, TECHNOLOGY & ENGINEERING / Quality Control, TECHNOLOGY & ENGINEERING / Industrial Engineering, SCIENCE / Physics / Condensed Matter, Industrial quality control, Industrial chemistry and manufacturing technologies, Electronic devices and materials, Industrial chemistry & manufacturing technologies, Semi-conductors & super-conductors