Run-to-Run Control in Semiconductor Manufacturing

Summary

Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.

Product details

• Assisted by: Enrique (Pennsylvania State University del Castillo (Editor), del Castillo Enrique (Editor), Arnon M. (Friendswood Hurwitz (Editor), Hurwitz Arnon M. (Editor), James (University of Michigan Moyne (Editor), Moyne James (Editor)
• Publisher: Taylor and Francis
• Languages: English
• Product format: Hardback
• Released: 30.11.2000
• EAN: 9780849311789
• ISBN: 978-0-8493-1178-9
• No. of pages: 366
• Weight: 625 g
• Illustrations: Tabellen, schwarz-weiss
• Subjects: Natural sciences, medicine, IT, technology > Technology > Mechanical engineering, production engineering; TECHNOLOGY & ENGINEERING / Industrial Engineering, TECHNOLOGY & ENGINEERING / Manufacturing, Production engineering, Production and industrial engineering, Electronic devices and materials, Semi-conductors & super-conductors