Defects in Microelectronic Materials and Devices

List of contents

Defects in Ultra-Shallow Junctions. Hydrogen-Related Defects in Silicon, Germanium, and Silicon–Germanium Alloys. Defects in Strained-Si MOSFETs. The Effect of Defects on Electron Transport in Nanometer-Scale Electronic Devices: Impurities and Interface Roughness. Electrical Characterization of Defects in Gate Dielectrics. Dominating Defects in the MOS System: Pb and E0 Centers. Oxide Traps, Border Traps, and Interface Traps in SiO2. From 3D Imaging of Atoms to Macroscopic Device Properties. Defect Energy Levels in HfO2 and Related High-K Gate Oxides. Spectroscopic Studies of Electrically Active Defects in High-k Gate Dielectrics. Defects in CMOS Gate Dielectrics. Negative Bias Temperature Instabilities in High-k Gate Dielectrics. Defect Formation and Annihilation in Electronic Devices and the Role of Hydrogen. Toward Engineering Modeling of Negative Bias Temperature Instability. Wear-Out and Time-Dependent Dielectric Breakdown in Silicon Oxides. Defects Associated with Dielectric Breakdown in SiO2-Based Gate Dielectrics. Defects in Thin and Ultrathin Silicon Dioxides. Structural Defects in SiO2–Si Caused by Ion Bombardment. Impact of Radiation-Induced Defects on Bipolar Device Operation. Silicon Dioxide–Silicon Carbide Interfaces: Current Status and Recent Advances. Defects in SiC. Defects in Gallium Arsenide. Appendix: Selected High-Impact Journal Articles on Defects in Microelectronic Materials and Devices.

About the author

Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf

Product details

• Authors: Daniel M. Schrimpf Fleetwood
• Assisted by: Daniel M Fleetwood (Editor), Daniel M. Fleetwood (Editor), Fleetwood Daniel M. (Editor), Ronald D Schrimpf (Editor), Ronald D. Schrimpf (Editor), Schrimpf Ronald D. (Editor)
• Publisher: Taylor & Francis Ltd.
• Languages: English
• Product format: Paperback / Softback
• Released: 07.10.2019
• EAN: 9780367386399
• ISBN: 978-0-367-38639-9
• No. of pages: 770
• Subjects: Natural sciences, medicine, IT, technology > Physics, astronomy > Miscellaneous; SCIENCE / Physics / Condensed Matter, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, Electronics engineering, TECHNOLOGY & ENGINEERING / Materials Science / General