Capacitive Silicon Resonators - Performance Enhancement Methods

Summary

Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.

Product details

• Authors: Takahito Ono, Nguyen Van Toan, Nguyen Ono Van Toan
• Publisher: Taylor & Francis Ltd.
• Languages: English
• Product format: Hardback
• Released: 24.06.2019
• EAN: 9780367217761
• ISBN: 978-0-367-21776-1
• No. of pages: 162
• Subjects: Natural sciences, medicine, IT, technology > Technology > General, dictionaries; TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS, TECHNOLOGY & ENGINEERING / Microwaves, TECHNOLOGY & ENGINEERING / Electronics / Circuits / General, TECHNOLOGY & ENGINEERING / Electrical, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, Electrical Engineering, Mechanical Engineering, Electronic devices & materials, Instruments & instrumentation engineering, Electronic devices and materials, Instruments and instrumentation