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The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.
The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:
- Thin-film integrated passives as an alternative to discrete passives
- The possibility of piezoelectric MEMS
- Solutions for MEMS gyroscopes
- Advanced interconnect technologies
- Ambient energy harvesting
- Bulk acoustic wave resonators
- Ultrasonic receiver arrays using MEMS sensors
- Optical MEMS-based spectrometers
- The integration of MEMS resonators with conventional circuitry
- A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns
- Wireless microactuators to enable implantable MEMS devices for drug delivery
- MEMS technologies for tactile sensing and actuation in robotics
- MEMS-based micro hot-plate devices
- Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring
- Sensors using passive acousto-electric devices in wired and wireless systems
Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
List of contents
Breakthrough Technology: Microsystems to Nano-Microsystems: A Technological Breakthrough. HfO2-Based High- Dielectrics for Use in MEMS Applications. Piezoelectric Thin Films for MEMS Applications. CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes. Bulk Acoustic Wave Gyroscopes. Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integration. Modeling of Piezoelectric MEMS Vibration Energy Harvesters. Interface Circuits for Capacitive MEMS Gyroscopes. Electromechanical Loops for High-Performance and Robust Gyroscope System Design. MEMS-Based Novel Applications: Bulk Acoustic Wave Resonators for Mobile Communication Systems. Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications. MEMS-Based Lamellar Grating Fourier Transform Spectrometers. Microelectromechanical Resonators for RF Applications. Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly-From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Logging. Radio-Controlled Wireless MEMS Actuators and Applications. Advanced MEMS Technologies for Tactile Sensing and Actuation. MEMS-Based Micro Hot-Plate Devices. A Wireless Sensor Networks Enabled Inertial Sensor. Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications. Index.
Report
"The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."
-Boris Stoeber, The University of British Columbia, Vancouver, Canada
