Physics of Radiofrequency Capacitive Discharge

Informationen zum Autor V. P. Savinov Zusammenfassung This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties. Inhaltsverzeichnis Foreword Introduction Abbreviations 1. Main physical properties and characteristics of radiofrequency capacitive discharge 2. Physical properties of near-electrode layers of space charge of RF capacitive discharge 3. Edge effects in the RF capacitive discharge 4. Near-electrode electron beams in RF capacitive discharge 5. Physical properties of RF gas discharge plasma References Index

Product details

• Authors: V. P. Savinov, V. P. (Lomonosov Moscow State University Savinov
• Publisher: Taylor & Francis Ltd.
• Languages: English
• Product format: Hardback
• Released: 21.05.2018
• EAN: 9781138600805
• ISBN: 978-1-138-60080-5
• No. of pages: 342
• Subjects: Natural sciences, medicine, IT, technology > Physics, astronomy > General, dictionaries; SCIENCE / Physics / General, SCIENCE / Chemistry / General, Plasma Physics, Electronic devices and materials, Chemical physics, Semi-conductors & super-conductors