Bruce W. (Rochester Institute of Technology Smith, Bruce W. Suzuki Smith, Bruce W. Smith, Smith Bruce W., Kazuaki Suzuki, Suzuki Kazuaki - Microlithography - Science and Technology

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Bruce W. (Rochester Institute of Technology Smith, Bruce W. Suzuki Smith, Bruce W. Smith, Smith Bruce W., Kazuaki Suzuki, Suzuki Kazuaki

Microlithography - Science and Technology

English · Hardback

New edition in preparation, currently unavailable

Description

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Summary

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

Product details

Authors Bruce W. (Rochester Institute of Technology Smith, Bruce W. Suzuki Smith
Assisted by Bruce W. Smith (Editor), Smith Bruce W. (Editor), Kazuaki Suzuki (Editor), Suzuki Kazuaki (Editor)
Publisher Taylor & Francis Ltd.
 
Languages English
Product format Hardback
Released 20.05.2020
 
EAN 9781439876756
ISBN 978-1-4398-7675-6
No. of pages 838
Subjects Natural sciences, medicine, IT, technology > Physics, astronomy > Electricity, magnetism, optics

TECHNOLOGY & ENGINEERING / Lasers & Photonics, TECHNOLOGY & ENGINEERING / Electronics / General, TECHNOLOGY & ENGINEERING / Electronics / Circuits / General, TECHNOLOGY & ENGINEERING / Electrical, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, Electrical Engineering, Optical physics, Electronics engineering

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