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Informationen zum Autor J. Michael Sherer Klappentext Given the variety of different exhaust compounds and the various threats that each poses to the exhaust management system! the proper choice of exhaust system can become a confusing and daunting task. This invaluable reference offers practical guidance on selecting an appropriate system for a given application. The author begins with facility layout! support facilities operation! and semiconductor process equipment! followed by exhaust types and challenges. Next! several chapters explore the different types of devices such as point-of-use devices! centralized wet scrubbers! and centralized VOC control. The book concludes with chapters devoted to emergency releases and examples of these systems in use. Zusammenfassung Given the myriad exhaust compounds and the corresponding problems they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, this book offers guidance on selecting an appropriate system for a given application. Inhaltsverzeichnis SEMICONDUCTOR AND WAFER MANUFACTURING FACILITIESWafer Fab Layout Facility-Support Operations Semiconductor Process EquipmentEXHAUST TYPES AND CHALLENGES Exhaust Types Exhaust Management ChallengesPOINT-OF-USE DEVICES AND EXHAUST-LINE REQUIREMENTSPoint-Of-Use Device InformationSurrounding Exhaust-Line RequirementsExamples of Point-Of-Use Devices for Selected Processes Fab Examples of Point-Of-Use DevicesDeveloping a Point-Of-Use Device and Surrounding Exhaust-Line Strategy"Development Opportunities" for Point-Of-Use Devices CENTRALIZED SCRUBBERS Introduction General Design and Operation General Operation InformationAcid Scrubbers for Large Storage Tanks of Concentrated Acid SolutionCentralized Abatement Systems for Higher Inlet Concentrations of Acid Compounds! Chlorine! and Acid Mists Centralized Scrubbing System for Oxides of Nitrogen Specifying a Centralized Wet ScrubberCENTRALIZED EQUIPMENT TO CONTROL VOLATILE ORGANIC COMPOUNDSIntroduction Centralized Equipment Technologies to Control Volatile Organic CompoundsExamples of Selection Criteria for Centralized Equipment to Control Volatile Organic CompoundsLocation of Fans Testing of Centralized Equipment to Control Volatile Organic CompoundsSpecification to Supplier of Centralized Equipment to Control Volatile Organic CompoundsEMERGENCY RELEASESIntroduction Controlling Releases from Gas Cylinders or Other Vessels Silane Emergency ReleaseReduction of Emergency Release of Concentrations of Stack DischargeEXHAUST MANAGEMENT AND AIR ABATEMENT EQUIPMENT EXAMPLESList of Examples Example No. 7-1Example No. 7-2Example No. 7-3Example No. 7-4Example No. 7-5List of Acronyms ...
