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Zusatztext "This book covers all aspects of MEMS design with large numbers of pictures. It is a very good reference book for everyone interested in the field. It is also an excellent supplementary text for a course on solid state devices." - In IEEE Circuits & Devices! September/ October 2006! Vol. 22! No. 5 Informationen zum Autor James J. Allen Klappentext It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed. The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:Understanding the fabrication technologies that are available Recognizing the relevant physics involved for micron scale devicesConsidering implementation issues applicable to computer aided design Focusing on the engineering details and the subsequent evaluation testing Maintaining an eye for detail regarding both reliability and packaging These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development. Zusammenfassung Offers information helpful to develop a successful micro electro mechanical system (MEMS) design. This work explains the design process by illustrating the range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed. Inhaltsverzeichnis Introduction. Fabrication Processes. MEMS Technologies. Scaling Issues for MEMS. Design Realization Tools for MEMS. Electro-Mechanics. Modeling and Design.MEMS Sensors and Actuators. Packaging. Reliability. Appendix....
