Sige and Si Strained-Layer Epitaxy for Silicon Heterostructure Devices

Informationen zum Autor John D. Cressler Klappentext Focuses on the materials science aspects of silicon heterostructure. This book defines the various advances in the Si-SiGe strained-layer epitaxy for device applications. It covers modern SiGe epitaxial growth techniques! EPI defects and dopant diffusion in thin films! stability constraints! and electronic properties of SiGe and Si-C alloys. Zusammenfassung Focuses on the materials science aspects of silicon heterostructure. This book defines the various advances in the Si-SiGe strained-layer epitaxy for device applications. It covers modern SiGe epitaxial growth techniques, EPI defects and dopant diffusion in thin films, stability constraints, and electronic properties of SiGe and Si-C alloys. Inhaltsverzeichnis Contents Introduction The Big Picture; J.D. Cressler A Brief History of the Field; J.D. Cressler SiGe and Si Strained-Layer Epitaxy Overview: SiGe and Si Strained-Layer Epitaxy; J.D. Cressler Strained SiGe and Si Epitaxy; B. Tillack and P. Zaumseil Si/SiGe(C) Eptiaxy by RTCVD; D. Dutartre! F. Deléglise! C. Fellous! L. Rubaldo! and A. Talbot MBE Growth Techniques; M. Oehme and E. Kasper UHV/CVD Growth Techniques; T.N. Adam Defects and Diffusion in SiGe and Strained Si; A.R. Peaker and V. Markevich Stability Constraints in SiGe Epitaxy; A. Fischer Electronic Properties of Strained Si/SiGe and Si1-yCy Alloys; J.L. Hoyt Carbon Doping of SiGe; H.J. Osten Contact Metallization on Silicon-Germanium; C.K. Maiti Selective Etching Techniques for SiGe/Si; S. Monfray! S. Borel! and T. Skotnicki Appendices Properties of Silicon and Germanium; J.D. Cressler The Generalized Moll-Ross Relations; J.D. Cressler Integral Charge-Control Relations; M. Schröter Sample SiGe HBT Compact Model Parameters; R.M. Malladi Index

Product details

• Authors: John D. Cressler, John D. (Georgia Institute of Technology Cressler, Cressler John D.
• Publisher: Taylor & Francis Ltd.
• Languages: English
• Product format: Hardback
• Released: 13.12.2007
• EAN: 9781420066852
• ISBN: 978-1-4200-6685-2
• No. of pages: 262
• Subjects: Natural sciences, medicine, IT, technology > Technology > Heat, energy and power station engineering; TECHNOLOGY & ENGINEERING / General, TECHNOLOGY & ENGINEERING / Electronics / General, TECHNOLOGY & ENGINEERING / Electronics / Circuits / General, TECHNOLOGY & ENGINEERING / Electrical, Electrical Engineering, environmental science, engineering & technology, Environmental science, engineering and technology, Electronics: circuits and components, Circuits & components