Fr. 255.00

Mems - Applications

English · Hardback

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Informationen zum Autor Mohamed Gad-el-Hak Klappentext Thoroughly revised and updated! the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts in the field! this volume explores a wide range of MEMS applications! ranging from inertial sensors! microactuators! and microscale vacuum pumps to microrobtics and micro-droplet generators. The final section of the book looks toward the future of MEMS! including MEMS autonomous control of free-shear flows and fabrication technologies for nanoscale devices. New chapters in this edition explore topics such as nonlinear electrokinetic devices and molecular self-assembly. Zusammenfassung Offers an overview of various MEMS applications. This book surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Inhaltsverzeichnis Introduction. Inertial Sensors. Micromachined Pressure Sensors: Devices! Interface Circuits! and Performance Limit. Surface Micromachined Devices. Microactuators. Sensors and Actuators for Turbulent Flows. Mibrorobotics. Microscale Vacuum Pumps. Nonlinear Electrokinetic Devices. Micro-Droplet Generators. Micro-Heat-Pipes and Micro-Heat- Spreaders. Microchannel Heat Sinks. Flow Control. The Future: Reactive Control for Skin-Friction Reduction. Towards MEMS Autonomous Control of Free-Shear Flows. Fabrication Technologies for Nanoeletromechanical Systems. Molecular Self-Assembly: Fundamental Concepts and Applications.

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