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“The theoretical equations for each of the NEMS/MEMS characteristics and applications are painstakingly derived and nicely illustrated with generalized charts and schematic drawings… This second edition offers a broader coverage of topics and depth than the author’s first edition…†—Micro Nano Newsletter, Dec. 2005, Vol. 10 No. 12"This would be an excellent book for a senior undergraduate or graduate two-semester course in materials science or electrical engineering. It not only presents a good overview of important areas of development in micro and nano technology, but it also contains many examples, homework problems, and lots of references for further study at the end of each chapter." – In IEEE Electrical Insulation Magazine, May/June 2008, Vol. 24, No. 3 Sergey Edward Lyshevski Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices. Zusammenfassung Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.NANOTECHNOLOGY AND MICROTECHNOLOGY (NANO- AND MICRO- SCIENCE, ENGINEERING AND TECHNOLOGY), AND BEYOND Introduction and Overview: From Micro- to Nano- and Beyond to Stringo-Scale Introductory Definitions to the Subjects Current Developments and Needs for Coherent Revolutionary Developments Societal Challenges and Implications NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES Sizing Features: From Micro- to Nano-, and from Nano- to Stringo-Scale MEMS and NEMS Definitions Introduction to Taxonomy of Nano- and Microsystem Synthesis and Design Introduction to Design and Optimization of Nano- and Microsystems in the Behavioral Domain NANO- AND MICROSYSTEMS: CLASSIFICATION AND CONSIDERATION Biomimetics, Biological Analogies,and Design of NEMS and MEMS Micro- and Nanoelectromechanical Systems: Scaling Laws and Mathematical Modeling MEMS Examples and MEMS Architectures Introduction to Microfabrication and Micromachining FUNDAMENTALS OF MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES Introduction and Description of Basic Processes in Microfabrication Microfabrication and Micromachining of ICs, Microstructures, and Microdevices MEMS Fabrication Technologies DEVISING AND SYNTHESIS OF NEMS AND MEMS Motion Nano- and Microdevices: Synthesis and Classification Microaccelerometers as Microelectromechanical Microdevices Optimization with Application to Synthesis and Classification Solver Nanoengineering Bioinformatics and Its Application MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS AND DEVICES Introduction to Modeling, Analysis, and Simulation Basic Electromagnetics with Applications to MEMS and NEMS Model Developments of Micro- and Nanoactuators Using Electromagnetics Classical Mechanics and Its Application to MEMS Equations of Motions Direct-Current Micromachines Simulation of MEMS in the MATLAB Environment with Examples Induction Micromachines Synchronous Micromachines Permanent-Magnet Stepper Micromotors Piezotransducers Modeling of Electromagnetic Radiating Energy Microdevices Thermodynamics, Thermoanalysis, and Heat Equation QUANTUM MECHANICS AND ITS APPLICATIONS Atomic Structures and Quantum Mechanics Molecular and Nanostructure Dynamics Quantum Mechanics and Energy Bands...
