Integrated Circuit Fabrication - Science and Technology

List of contents

1. Historical Perspective, Moore's Law and Future Technology Prospects; 2. Modern CMOS Technology; 3. Semiconductor Materials = Crystal Growth, Wafer Preparation and Material Properties; 4. Semiconductor Manufacturing - Clean Rooms, Wafer Cleaning, Gettering and Chip Yield; 5. Lithography; 6. Semiconductor/Insulator Interfaces; 7. Doping in Semiconductors; 8. Ion Implantation; 9. Etching Technologies and Chemical-Mechanical Polishing; 10. Deposition Technologies; 11. Backend (Interconnect) Processing Technologies.

About the author

James D. Plummer is a Professor of Electrical Engineering at Stanford University. He has over thirty years of experience in teaching semiconductor fabrication and device physics, and has served on the Board of Directors of companies including Intel and Cadence. He is a Member of the National Academy of Engineering and the American Academy of Arts and Sciences, a Fellow of the Institute of Electrical and Electronics Engineers, and a co-author of Silicon VLSI Technology (2000).Peter B. Griffin is a Senior Research Engineer in Electrical Engineering at Stanford University, and a recognized expert on microfabrication. He has significant hands-on experience in building semiconductor structures, and teaching semiconductor technology courses, at the Stanford Nanofabrication Facility. He is a co-author of Silicon VLSI Technology (2000).

Product details

• Authors: Peter B. Griffin, Peter B. (Stanford University Griffin, Griffin Peter B., James D. Plummer, James D. (Stanford University Plummer, Plummer James D.
• Publisher: Cambridge University Press ELT
• Languages: English
• Product format: Hardback
• Released: 16.11.2023
• EAN: 9781009303583
• ISBN: 978-1-0-0930358-3
• No. of pages: 700
• Subjects: Natural sciences, medicine, IT, technology > Technology > Mechanical engineering, production engineering; TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics, Materials science, Electronics engineering, For higher / tertiary / university education