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Zusatztext "This book gives a fascinating introduction to the subject! and places it superbly within its context....It is original! timely and well written." (Engineering Science & Education Jnl. April 2002) Informationen zum Autor Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USA Vijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures. Klappentext Eine moderne Einführung in das relativ junge Gebiet der Erzeugung winziger Strukturen, die insbesondere zur Herstellung von Mikrosensoren, Schrittmotoren und miniaturisierten Signalverarbeitungseinheiten benötigt werden. Besprochen wird eine ganze Palette von Mikrofertigungstechniken wie Laserablation und LIGA. Angesprochen werden dabei auch modernste Anwendungsgebiete wie organische Dünnschichttransistoren (TFTs), Antennen, drahtlose Telemetriesysteme und Systeme zur Signalweiterleitung. Zusammenfassung Focusing on microstereolithography and other microfabrication for 3D MEMS, this volume discusses the principles of microstereolithography for fabrication of 3D MEMS devices. It provides an account of the developments in related microfabrication and combined architecture techniques, illustrating their application in the engineering field. Inhaltsverzeichnis Preface. Microelectromechanical Systems. Fundamentals of Polymer Synthesis for MEMS. Stereolithography (SL). Microstereolithography Techniques I-Scanning Method. Microstereolithography Techniques II-Projection Method. Polymeric MEMS Architecture with Silicon, Metal, and Ceramics. Combined Silicon and Polymeric Structures. Micromolding. Applications. Appendix 1: Some Polymers for MEMS. Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography. Index....
List of contents
Preface.
Microelectromechanical Systems.
Fundamentals of Polymer Synthesis for MEMS.
Stereolithography (SL).
Microstereolithography Techniques I-Scanning Method.
Microstereolithography Techniques II-Projection Method.
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.
Combined Silicon and Polymeric Structures.
Micromolding.
Applications.
Appendix 1: Some Polymers for MEMS.
Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.
Index.
Report
"This book gives a fascinating introduction to the subject, and places it superbly within its context....It is original, timely and well written." (Engineering Science & Education Jnl. April 2002)
