Thin-Film Deposition: Principles and Practice

Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.

List of contents

Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.

About the author

McGraw-Hill authors represent the leading experts in their fields and are dedicated to improving the lives, careers, and interests of readers worldwide

Summary

Offers a complete description of the theory and technology of thin film deposition. This book offers a broad perspective, and gives readers the tools to objectively evaluate and choose the appropriate thin film process for a specific application. It also includes a list of symbols and an extensive index.

Product details

• Authors: Smith, Donald Smith, Donald L. Smith, Smith Donald
• Publisher: McGraw-Hill
• Languages: English
• Product format: Hardback
• Released: 30.04.1995
• EAN: 9780070585027
• ISBN: 978-0-07-058502-7
• Dimensions: 155 mm x 224 mm x 41 mm
• Weight: 998 g
• Illustrations: Illustrationen, nicht spezifiziert
• Subjects: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering; SCIENCE / Physics / Condensed Matter, Materials science, TECHNOLOGY & ENGINEERING / Materials Science / General, Electronic devices and materials, Semi-conductors & super-conductors