Fr. 153.60

Modern GAAS Processing Methods

English · Hardback

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Description

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This book gives professional microwave and semiconductor IC design and process engineers the information they need to apply GaAs processing techniques for improved reliability.

List of contents

GaAs material and crystal properties; GaAs devices; general process techniques; cleaning and cleanliness; wet etching; photolithography; nonoptical lithography; plasma processing equipment and plasma-assisted deposition; dry etching; plasma, RIE, RIBE, ion milling; specific process types; device isolation; ohmic contacts; schottky barriers and gate formation; first-level metal, dielectric formation, second-level metal; capacitors, inductors, and resistors.

Product details

Authors Ralph E. Williams
Publisher Artech House Publishers
 
Languages English
Product format Hardback
Released 01.06.1990
 
EAN 9780890063439
ISBN 978-0-89006-343-9
No. of pages 460
Dimensions 158 mm x 235 mm x 35 mm
Weight 794 g
Series Artech House Microwave Library
Artech House Microwave Library
Subject Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering

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