Fr. 375.70

Materials Science in Microelectronics I - The Relationships Between Thin Film Processing and Structure

English · Hardback

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Description

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Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing/structure relationship, and structure/properties relationship. This volume focuses on the first relationship - that between processing and the structure of the thin-film.

Product details

Authors E. S. Machlin, Eugene Machlin, Eugene (Columbia University Machlin, Machlin Eugene
Publisher ELSEVIER SCIENCE BV
 
Languages English
Product format Hardback
Released 21.09.2005
 
EAN 9780080446400
ISBN 978-0-08-044640-0
No. of pages 270
Subject Natural sciences, medicine, IT, technology > Technology

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