Read more
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications-practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
List of contents
Gases.
Gas Phase Collision Processes.
Plasmas.
DC Glow Discharges.
RF Discharges.
Sputtering.
Plasma Etching.
Appendices.
Index.
About the author
Hillary Chapman is a writer, songwriter, teacher, and guitarist. He is a fourth generation American Bahá'í who is the grandson of Hand of the Cause Leroy loas, who worked closely with Shoghi Effendi and Rú¿íyyih Khánum. He holds degrees from Haverford College, the University of Pennsylvania, and a diploma from the University of Paris.
Summary
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals.
