Semiconductor Microchips and Fabrication - A Practical Guide to Theory and Manufacturing

Semiconductor Microchips and Fabrication
 
Advanced and highly illustrated guide to semiconductor manufacturing from an experienced industry insider
 
Semiconductor Microchips and Fabrication is a practical yet advanced book on the theory, design, and manufacturing of semiconductor microchips that describes the process using the principles of physics and chemistry, fills in the knowledge gaps for professionals and students who need to know how manufacturing equipment works, and provides valuable suggestions and solutions to many problems that students or engineers often encounter in semiconductor processing, including useful experiment results to help in process work.
 
The explanation of the semiconductor manufacturing process, and the equipment needed, is carried out based on the machines that are used in clean rooms over the world so readers understand how they can use the equipment to achieve their design and manufacturing ambitions. Combining theory with practice, all descriptions are carried out around the actual equipment and processes by way of a highly visual text, with illustrations including equipment pictures, manufacturing process schematics, and structures of semiconductor microchips.
 
Sample topics covered in Semiconductor Microchips and Fabrication include:
* An introduction to basic concepts, such as impedance mismatch from plasma machines and theories, such as energy bands and Clausius-Clapeyron equation
* Basic knowledge used in semiconductor devices and manufacturing machines, including DC and AC circuits, electric fields, magnetic fields, resonant cavity, and the components used in the devices and machines
* Transistor and integrated circuits, including bipolar transistors, junction field effect transistors, and metal-semiconductor field effect transistors
* The main processes used in the manufacturing of microchips, including lithography, metallization, reactive-ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD), thermal oxidation and implantation, and more
* The skills in the design and problem solving of processes, such as how to design a dry etching recipe, and how to solve the micro-grass problems in Bosch process
 
Through Semiconductor Microchips and Fabrication, readers can obtain the fundamental knowledge and skills of semiconductor manufacturing, which will help them better understand and use semiconductor technology to improve their product quality or project research. Before approaching this text, readers should have basic knowledge of physics, chemistry, and circuitry.

List of contents

Author Biography xi
 
Preface xiii
 
1 Introduction to the Basic Concepts 1
 
1.1 What Is a Microchip? 1
 
1.2 Ohm's Law and Resistivity 1
 
1.3 Conductor, Insulator, and Semiconductor 5
 
References 5
 
2 Brief Introduction of Theories 7
 
2.1 The Birth of Quantum Mechanics 7
 
2.2 Energy Band (Band) 11
 
References 15
 
3 Early Radio Communication 17
 
3.1 Telegraph Technology 17
 
3.2 Electron Tube 19
 
References 22
 
4 Basic Knowledge of Electric Circuits (Circuits) 23
 
4.1 Electric Circuits and the Components 23
 
4.2 Electric Field 26
 
4.3 Magnetic Field 28
 
4.4 Alternating Current 30
 
5 Further Discussion of Semiconductors and Diodes 33
 
5.1 Semiconductor Energy Band 33
 
5.2 Semiconductor Doping 36
 
5.3 Semiconductor Diode 42
 
References 46
 
6 Transistor and Integrated Circuit 47
 
6.1 Bipolar Transistor 47
 
6.2 Junction Field Effect Transistor 49
 
6.3 Metal-Semiconductor Field Effect Transistor 52
 
6.4 Metal-Insulator-Semiconductor Field Effect Transistor 55
 
References 60
 
7 The Development History of Semiconductor Industry 61
 
7.1 The Instruction of Semiconductor Products and Structures 61
 
7.2 A Brief History of the Semiconductor Industry 63
 
7.3 Changes in the Size of Transistors and SiliconWafers 65
 
7.4 Clean Room 67
 
7.5 Planar Process 71
 
References 75
 
8 Semiconductor Photonic Devices 77
 
8.1 Light-Emitting Devices and Light-Emitting Principles 77
 
8.2 Light-Emitting Diode (LED) 82
 
8.3 Semiconductor Diode Laser 88
 
8.3.1 Resonant Cavity 89
 
8.3.2 Reflection and Refraction of Light 91
 
8.3.3 Heterojunction Materials 93
 
8.3.4 Population Inversion and Threshold Current Density 94
 
References 96
 
9 Semiconductor Light Detection and Photocell 97
 
9.1 Digital Camera and CCD 97
 
9.2 Photoconductor 100
 
9.3 Transistor Laser 101
 
9.4 Solar Cell 105
 
References 106
 
10 Manufacture of Silicon Wafer 109
 
10.1 From Quartzite Ore to Polysilicon 110
 
10.2 Chemical Reaction 113
 
10.3 Pull Single Crystal 115
 
10.4 Polishing and Slicing 116
 
References 123
 
11 Basic Knowledges of Process 125
 
11.1 The Structure of Integrated Circuit (IC) 125
 
11.2 Resolution of Optical System 128
 
11.3 Why Plasma Used in the Process 131
 
References 133
 
12 Photolithography (Lithography) 135
 
12.1 The Steps of Lithography Process 135
 
12.1.1 Cleaning 135
 
12.1.2 Dehydration Bake 136
 
12.1.3 Photoresist Coating 138
 
12.1.4 Soft Bake 141
 
12.1.5 Alignment and Exposure 141
 
12.1.6 Developing 145
 
12.1.7 Inspection 146
 
12.1.8 Hard Bake 147
 
12.1.9 Descum 148
 
12.2 Alignment Mark (Mark) Design on the Photomask 152
 
12.3 Contemporary Photolithography Equipment Technologies 156
 
References 159
 
13 Dielectric Films Growth 161
 
13.1 The Growth of Silicon Dioxide Film 162
 
13.1.1 Thermal Oxidation Process of SiO2 162
 
13.1.2 LTO Process 164
 
13.1.3 PECVD Process of Silicon Dioxide 166
 
13.1.4 TEOS + O3 Deposition Using APCVD System 167
 
13.2 The Growth of Silicon Nitride Film 168
 
13.2.1 LPCVD 168
 
13.2.2 PECVD Process of Silicon Nitride 171
 
1

About the author

Mr. Yaguang Lian is a Research Engineer at Holonyak Micro & Nanotechnology Lab, the University of Illinois, USA. In his twenty years of working, he has trained thousands of students in using the manufacturing machines. Before Mr. Lian came to the USA, he worked at the Hebei Semiconductor Research Institute (HSRI), China, for over 13 years. At HSRI, he oversaw the entire manufacturing process line, from implantation to packaging, in addition to IC design work. Working in the field of semiconductors for over 30 years, Mr. Lian deeply understands the key points of the manufacturing process and has a profound knowledge on both theory and equipment.

Summary

Semiconductor Microchips and Fabrication

Advanced and highly illustrated guide to semiconductor manufacturing from an experienced industry insider

Semiconductor Microchips and Fabrication is a practical yet advanced book on the theory, design, and manufacturing of semiconductor microchips that describes the process using the principles of physics and chemistry, fills in the knowledge gaps for professionals and students who need to know how manufacturing equipment works, and provides valuable suggestions and solutions to many problems that students or engineers often encounter in semiconductor processing, including useful experiment results to help in process work.

The explanation of the semiconductor manufacturing process, and the equipment needed, is carried out based on the machines that are used in clean rooms over the world so readers understand how they can use the equipment to achieve their design and manufacturing ambitions. Combining theory with practice, all descriptions are carried out around the actual equipment and processes by way of a highly visual text, with illustrations including equipment pictures, manufacturing process schematics, and structures of semiconductor microchips.

Sample topics covered in Semiconductor Microchips and Fabrication include:
* An introduction to basic concepts, such as impedance mismatch from plasma machines and theories, such as energy bands and Clausius-Clapeyron equation
* Basic knowledge used in semiconductor devices and manufacturing machines, including DC and AC circuits, electric fields, magnetic fields, resonant cavity, and the components used in the devices and machines
* Transistor and integrated circuits, including bipolar transistors, junction field effect transistors, and metal-semiconductor field effect transistors
* The main processes used in the manufacturing of microchips, including lithography, metallization, reactive-ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD), thermal oxidation and implantation, and more
* The skills in the design and problem solving of processes, such as how to design a dry etching recipe, and how to solve the micro-grass problems in Bosch process

Through Semiconductor Microchips and Fabrication, readers can obtain the fundamental knowledge and skills of semiconductor manufacturing, which will help them better understand and use semiconductor technology to improve their product quality or project research. Before approaching this text, readers should have basic knowledge of physics, chemistry, and circuitry.

Product details

• Authors: Lian, Yaguang Lian, Yaguang (University of Illinois Lian
• Publisher: Wiley, John and Sons Ltd
• Languages: English
• Product format: Hardback
• Released: 31.12.2022
• EAN: 9781119867784
• ISBN: 978-1-119-86778-4
• No. of pages: 320
• Subjects: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering; Physik, Halbleiter, Integrierte Schaltung, Mikrochip, Physics, Electronic materials, Semiconductors, Electrical & Electronics Engineering, Elektrotechnik u. Elektronik, Elektronische Materialien, Halbleiterphysik, Semiconductor Physics