Fr. 196.00

Fabrication of Silicon Microprobes for Optical Near-Field Applications

English · Hardback

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Description

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About the author

Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

Summary

Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes.

Product details

Authors Esashi Masayoshi, Masayoshi Esashi, Phan Ngoc Minh, Minh Phan Ngoc, Ono Takahito, Takahito Ono
Publisher Taylor and Francis
 
Languages English
Product format Hardback
Released 15.01.2002
 
EAN 9780849311543
ISBN 978-0-8493-1154-3
No. of pages 192
Weight 408 g
Illustrations schwarz-weiss Illustrationen
Subjects Natural sciences, medicine, IT, technology > Technology > Miscellaneous

TECHNOLOGY & ENGINEERING / Industrial Engineering, TECHNOLOGY & ENGINEERING / Manufacturing, Precision engineering and manufacturing, Precision instruments manufacture

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