Fr. 546.00

Radio-Frequency Capacitive Discharges

English · Hardback

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Description

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Summary

Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.

Product details

Authors Yuri P. Raizer, Raizer Yuri P., Mikhail N. Shneider, Shneider Mikhail N., Nikolai A. Yatsenko, Yatsenko Nikolai A.
Publisher Taylor and Francis
 
Languages English
Product format Hardback
Released 24.02.1995
 
EAN 9780849386442
ISBN 978-0-8493-8644-2
No. of pages 304
Weight 750 g
Illustrations Raster,schwarz-weiss, Tabellen, schwarz-weiss
Subjects Natural sciences, medicine, IT, technology > Technology > Mechanical engineering, production engineering

TECHNOLOGY & ENGINEERING / Mechanical, SCIENCE / Mechanics / Fluids, Mechanical Engineering, Mechanics of fluids, Engineering: Mechanics of fluids

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