Efficient Extreme Ultraviolet Mirror Design - An FDTD approach

Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. It is an essential reference for EUV industry professionals.

About the author

Dr Yen-Min Lee obtained his PhD from the National Taiwan University (Taipei, Taiwan) before joining ASML Holding as a mechatronics engineer in their motion design group in the USA. He went on to join the optical design group at Eindhoven and served as a senior physics engineer in the optical metrology group (Linkou, Taiwan). His research interests include computational lithography, large-scale electromagnetic problems, parallel computing, inverse algorithms, optical metrology, and medical imaging.

Product details

• Authors: Yen-Min Lee
• Publisher: Institute of Physics Publishing
• Languages: English
• Product format: Hardback
• Released: 31.12.2021
• EAN: 9780750326506
• ISBN: 978-0-7503-2650-6
• No. of pages: 112
• Dimensions: 178 mm x 254 mm x 8 mm
• Weight: 418 g
• Illustrations: With figures in colour and black and white; 40 Illustrations
• Series: IOP ebooks; IOP Series in Advances in Optics, Photonics and Optoelectronics
• Subject: Natural sciences, medicine, IT, technology > Physics, astronomy > Electricity, magnetism, optics