Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit - From Mega-Bit to Giga-Bit

List of contents

1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation

About the author

Hiroyuki Tango

Summary

This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.

Product details

• Authors: Hiroyuki Tango
• Assisted by: Hiroyuki Tango (Editor), Tango Hiroyuki (Editor)
• Publisher: Taylor and Francis
• Languages: English
• Product format: Paperback / Softback
• Released: 26.11.1998
• EAN: 9789056990985
• ISBN: 978-90-5699-098-5
• No. of pages: 293
• Weight: 480 g
• Subjects: Natural sciences, medicine, IT, technology > IT, data processing > IT; COMPUTERS / General, TECHNOLOGY & ENGINEERING / Civil / General, COMPUTERS / Mathematical & Statistical Software, computer science