Mems - Design and Fabrication

Informationen zum Autor Mohamed Gad-el-Hak Klappentext Thoroughly revised and updated! the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field! MEMS: Design and Fabrication presents a comprehensive look at the materials! procedures! tools! and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible! this volume provides the practical knowledge needed for work in cutting-edge MEMS applications. Zusammenfassung Details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. This volume offers an overview of MEMS materials and examines various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB[registered] technology, and deep reactive ion etching. Inhaltsverzeichnis Introduction. Materials for Microelectromechanical Systems. MEMS Fabrication. LIGA and Micromolding. X-Ray Based Fabrication. EFAB Technology and Application. Single-Crystal Silicon Carbide MEMS: Fabrication! Characterization and Reliability. Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide. Polymer Microsystems: Materials and Fabrications. Optical Diagnostics to Investigate the Entrance Length in Microchannels. Microfabricated Chemical Sensors for Aerospace Applications. Packaging of Harsh Environment MEMS Devices.

Product details

• Authors: Mohamed Gad-El-Hak, Mohamed (Virginia Commonwealth Univers Gad-El-Hak
• Assisted by: Mohamed Gad-El-Hak (Editor), Mohamed (Virginia Commonwealth University Gad-el-Hak (Editor), Gad-el-Hak Mohamed (Editor)
• Publisher: Taylor & Francis Ltd.
• Languages: English
• Product format: Hardback
• Released: 29.11.2005
• EAN: 9780849391385
• ISBN: 978-0-8493-9138-5
• No. of pages: 664
• Series: Mechanical and Aerospace Engineering Series; Mechanical and Aerospace Engineering Series
• Subjects: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering; TECHNOLOGY & ENGINEERING / Mechanical, TECHNOLOGY & ENGINEERING / Civil / General, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, Electrical Engineering, environmental science, engineering & technology, Mechanical Engineering, Nanotechnology, Electronics engineering, Environmental science, engineering and technology